Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

被引：55
|
作者：
Atar, E
Sarioglu, C
Demirler, U
Kayali, ES
Cimenoglu, H [1 ]
机构：
[1] Istanbul Tech Univ, Dept Met & Mat Engn, TR-34469 Istanbul, Turkey
[2] Gebze Inst Technol, Dept Mat Sci & Engn, TR-41400 Gebze, Kocaeli, Turkey
[3] Marmara Univ, Dept Met & Mat Engn, TR-81040 Istanbul, Turkey
来源：
SCRIPTA MATERIALIA | 2003年 / 48卷 / 09期
关键词：
microindentation; residual stresses; thin films; X-ray diffraction;
D O I：
10.1016/S1359-6462(03)00019-8
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The residual stresses in ceramic thin films obtained by the indentation method have been found to be three times higher than those of the X-ray diffraction method. This discrepancy can be eliminated by setting the geometrical factor for the Vickers pyramid indenter to 1 in the relevant equation of the indentation method. (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：1331 / 1336
页数：6
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