Effects of synthesis conditions on self-organized growth of aligned arrays of silicon nanowires

被引：1
|
作者：
Niu, Jun-Jie [1 ]
Wang, Jian-Nong [1 ]
机构：
[1] Shanghai Jiao Tong Univ, Sch Mat Sci & Engn, Shanghai 200030, Peoples R China
来源：
CHEMICAL VAPOR DEPOSITION | 2006年 / 12卷 / 12期
关键词：
D O I：
10.1002/cvde.200604229
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Communication: The effects of CVD synthesis conditions, including nano-channel alumina (NCA) properties, catalyst distribution, and growth parameters on aligned arrays of silicon nanowires (SiNWs) are investigated. Array-ordered SiNWs are achieved by optimizing the above factors according to the vapor-liquid-solid (VLS) and nanochannel physical limitation mechanism. The study of arrays of SiNWs will permit better understanding of the growth mechanism and develop potential applications in nanoelectronics technology.
引用
收藏
页码：709 / +
页数：4
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