Effects of synthesis conditions on self-organized growth of aligned arrays of silicon nanowires

被引：1

作者：

Niu, Jun-Jie ^{[1
]}

Wang, Jian-Nong ^{[1
]}

机构：

[1] Shanghai Jiao Tong Univ, Sch Mat Sci & Engn, Shanghai 200030, Peoples R China

来源：

CHEMICAL VAPOR DEPOSITION | 2006年 / 12卷 / 12期

关键词：

D O I：

10.1002/cvde.200604229

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Communication: The effects of CVD synthesis conditions, including nano-channel alumina (NCA) properties, catalyst distribution, and growth parameters on aligned arrays of silicon nanowires (SiNWs) are investigated. Array-ordered SiNWs are achieved by optimizing the above factors according to the vapor-liquid-solid (VLS) and nanochannel physical limitation mechanism. The study of arrays of SiNWs will permit better understanding of the growth mechanism and develop potential applications in nanoelectronics technology.

引用

页码：709 / +

页数：4

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