共 50 条
- [1] Effect of resist sensitivity ratio on T-gate fabrication JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (06): : 2494 - 2498
- [3] Fabrication of Three-Side-Around Control Gate of Semi-Floating Gate Transistor CONFERENCE OF SCIENCE & TECHNOLOGY FOR INTEGRATED CIRCUITS, 2024 CSTIC, 2024,
- [8] Nanometer-scale gaps in hydrogen silsesquioxane resist for T-gate fabrication JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2007, 25 (06): : 2081 - 2084
- [9] Fabrication technology of a Si nanowire memory transistor using an inorganic electron beam resist process JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06): : 2640 - 2645
- [10] Fabrication and characterization of a pentacene thin film transistor with a polymer insulator as a gate dielectric JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2008, 26 (04): : 710 - 715