MOS technology: Trends and challenges in the ULSI era

被引：7
|
作者：
Shah, A
Yang, P
机构：
[1] Semiconductor Process and Device Center, Texas Instruments Inc., Dallas
来源：
MICROELECTRONICS AND RELIABILITY | 1997年 / 37卷 / 09期
关键词：
D O I：
10.1016/S0026-2714(97)00002-4
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reviews the trends in the MOS technology as we approach the turn of the century, and addresses the challenges that we face as the device geometries continue to scale and as the need to lower power dissipation grows, albeit with the demand for increasing device performance. (C) 1995 IEEE. Published by Elsevier Science Ltd.
引用
收藏
页码：1301 / 1307
页数：7
相关论文
共 50 条
  • [31] Current Trends and Challenges towards the Digital Health Era
    Costa-Garcia, Alvaro
    Okajima, Shotaro
    Yang, Ningjia
    Ueda, Sayako
    Shimoda, Shingo
    2022 IEEE INTERNATIONAL CONFERENCE ON ADVANCED ROBOTICS AND ITS SOCIAL IMPACTS (ARSO), 2022,
  • [32] ULSI technology development trend
    Okuto, Y
    Kunio, T
    2000 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, CAS 2000 PROCEEDINGS, 2000, : 3 - 9
  • [33] TECHNOLOGY OF MOS LSI/VLSI: STATUS AND CHALLENGES.
    Govindacharyulu, P.A.
    Zarabi, M.J.
    1600, (02):
  • [34] Dimensional metrology challenges for ULSI interconnects
    Havemann, R
    Marchman, H
    Dixit, G
    Jain, M
    Zielinski, E
    Ralston, A
    Hsu, Y
    Jin, C
    Singh, A
    Schlesinger, J
    CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY, 1998, 449 : 377 - 384
  • [35] MANAGERIAL AND ECONOMICAL CHALLENGES FOR VLSI/ULSI
    PISTORIO, P
    MICROELECTRONIC ENGINEERING, 1994, 23 (1-4) : 63 - 69
  • [36] Seminature model of a MOS transistor for ULSI circuit simulation
    Nauchno-Issledovatel'skaya, Laboratoriya Avtomatizatsii, Proektirovaniya, Taganrog, Russia
    Izv VUZ Radioelektron, 1 (12-22):
  • [37] Trends in automotive electronics and challenges in packaging technology
    Miyake T.
    Journal of Japan Institute of Electronics Packaging, 2019, 22 (07) : 602 - 606
  • [38] Scaling Trends and Challenges of Advanced Memory Technology
    Lee, Seok-Hee
    2014 INTERNATIONAL SYMPOSIUM ON VLSI DESIGN, AUTOMATION AND TEST (VLSI-DAT), 2014,
  • [39] The Fusion of Clinical Guidelines with Technology: Trends & Challenges
    MacDougall, Candice
    McGregor, Carolyn
    Percival, Jennifer
    ELECTRONIC JOURNAL OF HEALTH INFORMATICS, 2010, 5 (02):
  • [40] GNSS Chipset Technology Trends, Opportunities and Challenges
    Rubin, Dimitri
    PROCEEDINGS OF THE 34TH INTERNATIONAL TECHNICAL MEETING OF THE SATELLITE DIVISION OF THE INSTITUTE OF NAVIGATION (ION GNSS+ 2021), 2021, : 2070 - 2081
12345