Electrothermal Actuation of MEMS Resonator Based Filters with Piezoelectric Sensing

被引：0
|
作者：
Svilicic, B. [1 ,2 ]
Mastropaolo, E. [1 ]
Cheung, R. [1 ]
机构：
[1] Univ Edinburgh, Scottish Microelect Ctr, Edinburgh, Midlothian, Scotland
[2] Univ Rijeka, Fac Maritime Studies, Rijeka, Croatia
来源：
2016 PROGRESS IN ELECTROMAGNETICS RESEARCH SYMPOSIUM (PIERS) | 2016年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：3516 / 3516
页数：1
相关论文
共 50 条
  • [1] A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing
    Svilicic, Boris
    Mastropaolo, Enrico
    Cheung, Rebecca
    [J]. 28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014), 2014, 87 : 1406 - 1409
  • [2] Widely tunable MEMS ring resonator with electrothermal actuation and piezoelectric sensing for filtering applications
    Svilicic, Boris
    Mastropaolo, Enrico
    Cheung, Rebecca
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2015, 226 : 149 - 153
  • [3] Combining Electrothermal Actuation with Piezoelectric Actuation and Sensing in a Dynamic Mode AFM Microcantilever
    Nasrabadi, Hazhir Mahmoodi
    Nikooienejad, Nastaran
    Coskun, M. Bulut
    Moheimani, S. O. Reza
    [J]. 2022 IEEE SENSORS, 2022,
  • [4] Piezoelectric MEMS resonator-based oscillator for density and viscosity sensing
    Manzaneque, Tomas
    Ruiz-Diez, Victor
    Hernando-Garcia, Jorge
    Wistrela, Elisabeth
    Kucera, Martin
    Schmid, Ulrich
    Luis Sanchez-Rojas, Jose
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2014, 220 : 305 - 315
  • [5] Pulse Mode Actuation-Readout System Based on MEMS Resonator for Liquid Sensing
    Tang, Meng
    Cagliani, Alberto
    Davis, Zachary J.
    He, Lin
    [J]. 2014 9TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2014, : 216 - 219
  • [6] Conditioning Circuit for Simultaneous Sensing and Actuation in Piezoelectric MEMS Resonators
    Fort, Ada
    Panzardi, Enza
    Addabbo, Tommaso
    Mugnaini, Marco
    Vignoli, Valerio
    Trigona, Carlo
    [J]. 2019 IEEE SENSORS APPLICATIONS SYMPOSIUM (SAS), 2019,
  • [7] Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing
    Rakotondrabe, Micky
    Fowler, Anthony G.
    Moheimani, S. O. Reza
    [J]. 2012 IEEE SENSORS PROCEEDINGS, 2012, : 973 - 976
  • [8] Control of a Novel 2-DoF MEMS Nanopositioner With Electrothermal Actuation and Sensing
    Rakotondrabe, Micky
    Fowler, Anthony G.
    Moheimani, S. O. Reza
    [J]. IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 2014, 22 (04) : 1486 - 1497
  • [9] Characterization and Reliability Study of a MEMS Mirror Based on Electrothermal Bimorph Actuation
    Wang, Haoran
    Zhang, Xiaoyang
    Zhang, Daihua
    Zhou, Liang
    Xie, Huikai
    [J]. 2017 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2017, : 141 - 142
  • [10] Tunability of Piezoelectric MEMS Ring Resonator Based Filter
    Svilicic, Boris
    Wood, Graham S.
    Mastropaolo, Enrico
    Cheung, Rebecca
    [J]. PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016, 2016, 168 : 1517 - 1520
12345