Pulse Mode Actuation-Readout System Based on MEMS Resonator for Liquid Sensing

被引：0
|
作者：
Tang, Meng [1 ]
Cagliani, Alberto [2 ]
Davis, Zachary J. [3 ]
He, Lin [4 ]
机构：
[1] Soochow Univ, Dept Elect & Informat, Suzhou, Peoples R China
[2] Tech Univ Denmark, Dept Nanotechnol, Aarhus, Denmark
[3] Danish Technol Inst, Brondby, Denmark
[4] Univ Sci & Technol China, Dept Microelect, Beijing, Peoples R China
来源：
2014 9TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2014年
关键词：
mass sensing; pulse mode; humidity sensing; resonant frequency;
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0 similar to 80%.
引用
收藏
页码：216 / 219
页数：4
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