Pulse Mode Actuation-Readout System Based on MEMS Resonator for Liquid Sensing

被引：0

作者：

Tang, Meng ^{[1
]}

Cagliani, Alberto ^{[2
]}

Davis, Zachary J. ^{[3
]}

He, Lin ^{[4
]}

机构：

[1] Soochow Univ, Dept Elect & Informat, Suzhou, Peoples R China

[2] Tech Univ Denmark, Dept Nanotechnol, Aarhus, Denmark

[3] Danish Technol Inst, Brondby, Denmark

[4] Univ Sci & Technol China, Dept Microelect, Beijing, Peoples R China

来源：

2014 9TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2014年

关键词：

mass sensing; pulse mode; humidity sensing; resonant frequency;

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0 similar to 80%.

引用

页码：216 / 219

页数：4

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