Electrothermal Actuation of MEMS Resonator Based Filters with Piezoelectric Sensing

被引：0
|
作者：
Svilicic, B. [1 ,2 ]
Mastropaolo, E. [1 ]
Cheung, R. [1 ]
机构：
[1] Univ Edinburgh, Scottish Microelect Ctr, Edinburgh, Midlothian, Scotland
[2] Univ Rijeka, Fac Maritime Studies, Rijeka, Croatia
来源：
2016 PROGRESS IN ELECTROMAGNETICS RESEARCH SYMPOSIUM (PIERS) | 2016年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：3516 / 3516
页数：1
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