A Micromachined Nanopositioner With On-Chip Electrothermal Actuation and Sensing

被引：25
|
作者：
Zhu, Y. [1 ]
Bazaei, A. [1 ]
Moheimani, S. O. R. [1 ]
Yuce, M. R. [1 ]
机构：
[1] Univ Newcastle Australia, Sch Elect Engn & Comp Sci, Callaghan, NSW 2308, Australia
来源：
IEEE ELECTRON DEVICE LETTERS | 2010年 / 31卷 / 10期
基金：
澳大利亚研究理事会;
关键词：
Feedback control; microelectromechanical systems (MEMS); nanopositioning; thermal actuation; thermal position sensing;
D O I：
10.1109/LED.2010.2058841
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This letter describes the design of a micromachined nanopositioner with thermal actuation and sensing capabilities in a single chip. The positioner has a dynamic range of 14.4 mu m, and the sensor drift is 8.9 nm over 2000 s with a differential sensing scheme. The on-chip displacement sensing enables a feedback control capability. A proportional-integral feedback controller is designed and implemented digitally. The closed-loop step response results show a positioning resolution of 7.9 nm and a time constant of 1.6 ms.
引用
收藏
页码：1161 / 1163
页数：3
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