Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing

被引：0
|
作者：
Rakotondrabe, Micky [2 ]
Fowler, Anthony G. [1 ]
Moheimani, S. O. Reza [1 ]
机构：
[1] Univ Newcastle, Sch Elect Engn & Comp Sci, Callaghan, NSW 2308, Australia
[2] UTBM, ENSMM, UFC Besancon, FEMTO ST Inst,Dept AS2M,CNRS UMR6174, Besancon, France
来源：
2012 IEEE SENSORS PROCEEDINGS | 2012年
基金：
澳大利亚研究理事会;
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports a new 2-degree of freedom (DoF) microelectromechanical systems (MEMS) nanopositioner with actuation and sensing elements on the same chip. Novel features of this MEMS device include its 2-DoF (x-y axis) motion capability, the achievement of bi-directional movement (positive and negative displacement) along each axis thanks to the use of Z-shaped electrothermal actuators, and the measurement of x-y displacements by integrated electrothermal sensors positioned underneath the moving stage. The experimental characterization shows that displacements in excess of -5 mu m/+5 mu m and a response time of less than 300ms are achievable.
引用
收藏
页码：973 / 976
页数：4
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