Electrical characterization of epitaxial FeSi2 nanowire on Si (110) by conductive-atomic force microscopy

被引:5
|
作者
Liang, Shengde [1 ]
Ashcroft, Brian A. [2 ]
机构
[1] Renmin Univ China, Dept Chem, Beijing 100872, Peoples R China
[2] Arizona State Univ, Dept Phys, Tempe, AZ 85287 USA
基金
美国国家科学基金会;
关键词
NICKEL SILICIDE NANOWIRES; OPTICAL-PROPERTIES; MU-M; BETA-FESI2; TRANSISTOR; SUBSTRATE; SI(001); FILMS;
D O I
10.1557/JMR.2010.0042
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We used conductive-atomic force microscopy (c-AFM) for electrical characterization of self-assembled epitaxial iron silicide nanowires (NWs) on Si (110). The NWs, 6 nm high by 10 nm wide and several micrometers long, were partially covered by a macrogold-pad as one electrode. Another electrode is the conductive AFM tip. The resistance of a single FeSi2 NW was measured to be 29.7 k Omega, corresponding to a resistivity of 150 +/- 30 mu Omega.cm. A Schottky barrier formed between NWs and silicon substrate was clearly demonstrated, which offers electrical isolation for NWs. An equivalent circuit model based on the Schottky barrier was proposed and was correlated with measurement results. This simple electrical characterization approach may find wide applications for various one-dimensional nanostructures.
引用
收藏
页码:213 / 218
页数:6
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