Bulk periodic structures formation on monocrystalline silicon surface under the action of compression plasma flows

被引：9
|
作者：
Astashynski, V. M.
Ananin, S. I.
Emelyarlenko, A. S.
Kostyukevich, E. A.
Kuzmitzky, A. M.
Zhvavy, S. P.
Uglov, V. V.
机构：
[1] Natl Acad Sci Belarus, Inst Atom & Mol Phys, Minsk 220072, BELARUS
[2] Natl Acad Sci Belarus, Inst Elect, Minsk 220090, BELARUS
[3] Belarusian State Univ, Minsk 220080, BELARUS
来源：
APPLIED SURFACE SCIENCE | 2006年 / 253卷 / 04期
关键词：
plasma processing; plasma accelerators (guns); surface modification; melting; crystallization;
D O I：
10.1016/j.apsusc.2006.03.023
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The results of numerical simulation of monocrystalline silicon melting and crystallization under the action of compression plasma flow generated by quasistationary plasma accelerators with regard to phase transformations based on Kolmogorov equation are presented. Temporal and spatial characteristics of melting and crystallization processes for pulses of various forms are discussed. Based on data received and estimates made, the conclusion on substantial role of thermoelectric instability in bulk periodic structures formation was made. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：1866 / 1872
页数：7
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