Bulk periodic structures formation on monocrystalline silicon surface under the action of compression plasma flows

被引：9
|
作者：
Astashynski, V. M.
Ananin, S. I.
Emelyarlenko, A. S.
Kostyukevich, E. A.
Kuzmitzky, A. M.
Zhvavy, S. P.
Uglov, V. V.
机构：
[1] Natl Acad Sci Belarus, Inst Atom & Mol Phys, Minsk 220072, BELARUS
[2] Natl Acad Sci Belarus, Inst Elect, Minsk 220090, BELARUS
[3] Belarusian State Univ, Minsk 220080, BELARUS
来源：
APPLIED SURFACE SCIENCE | 2006年 / 253卷 / 04期
关键词：
plasma processing; plasma accelerators (guns); surface modification; melting; crystallization;
D O I：
10.1016/j.apsusc.2006.03.023
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The results of numerical simulation of monocrystalline silicon melting and crystallization under the action of compression plasma flow generated by quasistationary plasma accelerators with regard to phase transformations based on Kolmogorov equation are presented. Temporal and spatial characteristics of melting and crystallization processes for pulses of various forms are discussed. Based on data received and estimates made, the conclusion on substantial role of thermoelectric instability in bulk periodic structures formation was made. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：1866 / 1872
页数：7
相关论文
共 50 条
  • [41] FORMATION OF PERIODIC STRUCTURES ON A SILICON SURFACE BY A MILLISECOND Nd-LASER PULSE.
    Veiko, V.P.
    Dorofeev, I.A.
    Imas, Ya.A.
    Kalugina, T.I.
    Libenson, M.N.
    Shandybina, G.D.
    Soviet Technical Physics Letters (English Translation of Pis'ma v Zhurnal Tekhnicheskoi Fiziki), 1984, 10 (01): : 6 - 8
  • [42] FORMATION OF PERIODIC STRUCTURES ON SOLID-STATE SURFACE UNDER PRESSURE RELAXATIONS
    APOLLONOV, VV
    PROKHOROV, AM
    SHMAKOV, AV
    SHMAKOV, VA
    PISMA V ZHURNAL TEKHNICHESKOI FIZIKI, 1991, 17 (02): : 52 - 56
  • [43] MECHANISMS OF FORMATION OF PERIODIC STRUCTURES UNDER THE ACTION OF RADIATION ON ABSORBING CONDENSED MEDIA.
    Samokhin, A.A.
    Sychugov, V.A.
    Tishchenko, A.V.
    Soviet journal of quantum electronics, 1983, 13 (10): : 1433 - 1434
  • [44] Effect of titanium concentration on the structural-phase state of the surface layer of carbon steel alloyed under the action of compression plasma flows
    Uglov V.V.
    Cherenda N.N.
    Stal'moshenok E.K.
    Poluyanova M.G.
    Astashinskii V.M.
    Kuz'mitskii A.M.
    Inorganic Materials: Applied Research, 2010, 1 (02) : 155 - 161
  • [45] ELEMENTAL AND PHASE COMPOSITIONS AND MECHANICAL PROPERTIES OF TITANIUM SURFACE LAYER ALLOYED BY Zr, Nb, AND Al UNDER THE ACTION OF COMPRESSION PLASMA FLOWS
    Cherenda, N. N.
    Rogovaya, I. S.
    Shymanski, V., I
    Uglov, V. V.
    Saladukhin, I. A.
    Astashynski, V. M.
    Kuzmitski, A. M.
    Ivanov, Y. F.
    Petrikova, E. A.
    HIGH TEMPERATURE MATERIAL PROCESSES, 2022, 26 (02): : 1 - 9
  • [46] Elemental composition of the surface layer of a heat-resistant nickel alloy doped with zirconium atoms under the action of compression plasma flows
    Cherenda N.N.
    Uglov V.V.
    Kvasnitski V.V.
    Kvasnitski V.F.
    Journal of Surface Investigation, 2014, 8 (01): : 164 - 168
  • [47] Erosion of materials under the effect of compression plasma flows
    Cherenda N.N.
    Laskovnev A.P.
    Basalai A.V.
    Uglov V.V.
    Astashynski V.M.
    Kuzmitski A.M.
    Inorganic Materials: Applied Research, 2015, 6 (02) : 114 - 120
  • [48] Formation of nano-structured thin silicon layers by hydrogen plasma treatment of monocrystalline silicon
    Fahrner, WR
    Job, R
    Ulyashin, A
    PROCEEDINGS OF THE 2001 1ST IEEE CONFERENCE ON NANOTECHNOLOGY, 2001, : 282 - 287
  • [49] Formation of regular relief on a silicon surface under the action of polarized laser radiation
    Libenson, MN
    Makin, VS
    Pestov, YI
    Trubaev, VV
    JOURNAL OF OPTICAL TECHNOLOGY, 1996, 63 (02) : 173 - 180
  • [50] Formation of regular relief on a silicon surface under the action of polarized laser radiation
    Libenson, M.N.
    Makin, V.S.
    Pestov, Yu.I.
    Trubaev, V.V.
    Journal of Optical Technology (A Translation of Opticheskii Zhurnal), 1996, 63 (02):
12345