Reducing Threshold Voltage of Organic Field-Effect Transistor by using ZrO2/PMMA as Gate Dielectric

被引:0
|
作者
Shang, Liwei [1 ]
Liu, Ming [1 ]
Tu, Deyu [1 ]
Zhen, Lijuan [1 ]
Liu, Xinghua [1 ]
Liu, Ge [1 ]
机构
[1] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
关键词
Thin film; OFET; ZrO2; PMMA;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
By depositing a PMMA (poly(methyl methacrylate)) layer on top of an evaporated layer of ZrO2, the leakage has 4 orders of magnitude reducing compared with bare ZrO2 layer. Low roughness of PMMA/ZrO2 surface produces a high quality interface between the organic semiconductor and the combined insulator, thus the device has a significant improvement in performance. The typical field effect mobility, on/off current ratio, and sub-threshold slope of OFETs with bilayer dielectric are 5.6 x 10(-2) cm(2)/Vs, 1.2x10(3), and 0.3 V/decade respectively. It is noticeable that the threshold voltage is only 0.1V.
引用
收藏
页码:1033 / 1036
页数:4
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