Low-Voltage Organic Field-Effect Transistor With PMMA/ZrO2 Bilayer Dielectric

被引:20
|
作者
Shang, Liwei [1 ]
Liu, Ming [1 ]
Tu, Deyu [1 ]
Liu, Ge [1 ]
Liu, Xinohua [1 ]
Ji, Zhuoyu [1 ]
机构
[1] Chinese Acad Sci, Inst Microelect, Key Lab Nanofabricat & Novel Devices Integrat Tec, Beijing 100029, Peoples R China
基金
中国国家自然科学基金;
关键词
Dielectric films; leakage currents; thin-film devices; threshold logic devices; voltage control; THIN-FILM TRANSISTORS; HIGH-MOBILITY;
D O I
10.1109/TED.2008.2011576
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports on the application of a bilayer polymethylmethacrylate (PMMA)/ZrO2 dielectric in copper phthalocyanine (CuPc) organic field-effect transistors (OFETs). By depositing a PMMA layer on ZrO2, the leakage of the dielectric is reduced by one order of magnitude compared to single-layer ZrO2. A high-quality interface is obtained between the organic semiconductor and the combined insulators. By integrating the advantages of polymer and high-k dielectrics, the device achieves both high mobility and low threshold voltage. The typical field-effect mobility, threshold voltage, on/off current ratio, and subthreshold slope of OFETs with bilayer dielectric are 5.6 x 10(-2) cm(2)/V. S, 0.8 V, 1.2 x 10(3), and 2.1 V/dec, respectively. By using the bilayer dielectrics, the hysteresis observed in the devices with single-layer ZrO2 is no longer present.
引用
收藏
页码:370 / 376
页数:7
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