Metal-insulator-metal capacitor using electrosprayed nanoparticles

被引：12
|
作者：
Veliz, Bremnen [1 ]
Bermejo, Sandra [1 ]
Coll, Arnau [1 ]
Castaner, Luis [1 ]
机构：
[1] Univ Politecn Cataluna, Dept Elect Engn, ES-08034 Barcelona, Spain
来源：
APPLIED PHYSICS LETTERS | 2014年 / 105卷 / 01期
关键词：
DOUBLE-LAYER; THIN-FILMS; DIELECTRICS; ABSORPTION; DISPERSION; SURFACE;
D O I：
10.1063/1.4889746
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
An electrospray technique has been used to deposit SiO2 nanoparticles as insulator layer of a metal-insulator-metal device. Impedance spectroscopy measurements show that a 4.4 factor increase in capacitance is achieved compared to a continuous dielectric layer of the same permittivity and dimensions. (C) 2014 AIP Publishing LLC.
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页数：4
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