Binary pseudorandom test standard to determine the modulation transfer function of optical microscopes

被引：0

作者：

Lacey, Ian ^{[1
]}

Anderson, Erik H. ^{[1
]}

Artemiev, Nikolay A. ^{[1
]}

Babin, Sergey ^{[2
]}

Cabrini, Stefano ^{[1
]}

Calafiore, Guiseppe ^{[2
]}

Chan, Elaine R. ^{[1
]}

McKinney, Wayne R. ^{[1
]}

Peroz, Christophe ^{[2
]}

Takacs, Peter Z. ^{[3
]}

Yashchuk, Valeriy V. ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA

[2] ABeam Technol Inc, Hayward, CA 94541 USA

[3] Brookhaven Natl Lab, Upton, NY 11973 USA

来源：

APPLIED ADVANCED OPTICAL METROLOGY SOLUTIONS | 2015年 / 9576卷

关键词：

modulation transfer function; interferometric microscope; coded aperture imaging; calibration; test standard; correlation analysis; surface metrology; systematic error; ARRAYS;

D O I：

10.1117/12.2185191

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This work reports on the development of a binary pseudo-random test sample optimized to calibrate the MTF of optical microscopes. The sample consists of a number of 1-D and 2-D patterns, with different minimum sizes of spatial artifacts from 300 nm to 2 microns. We describe the mathematical background, fabrication process, data acquisition and analysis procedure to return spatial frequency based instrument calibration. We show that the developed samples satisfy the characteristics of a test standard: functionality, ease of specification and fabrication, reproducibility, and low sensitivity to manufacturing error.

引用

页数：7

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