Binary pseudorandom test standard to determine the modulation transfer function of optical microscopes

被引：0
|
作者：
Lacey, Ian [1 ]
Anderson, Erik H. [1 ]
Artemiev, Nikolay A. [1 ]
Babin, Sergey [2 ]
Cabrini, Stefano [1 ]
Calafiore, Guiseppe [2 ]
Chan, Elaine R. [1 ]
McKinney, Wayne R. [1 ]
Peroz, Christophe [2 ]
Takacs, Peter Z. [3 ]
Yashchuk, Valeriy V. [1 ]
机构：
[1] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA
[2] ABeam Technol Inc, Hayward, CA 94541 USA
[3] Brookhaven Natl Lab, Upton, NY 11973 USA
来源：
APPLIED ADVANCED OPTICAL METROLOGY SOLUTIONS | 2015年 / 9576卷
关键词：
modulation transfer function; interferometric microscope; coded aperture imaging; calibration; test standard; correlation analysis; surface metrology; systematic error; ARRAYS;
D O I：
10.1117/12.2185191
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This work reports on the development of a binary pseudo-random test sample optimized to calibrate the MTF of optical microscopes. The sample consists of a number of 1-D and 2-D patterns, with different minimum sizes of spatial artifacts from 300 nm to 2 microns. We describe the mathematical background, fabrication process, data acquisition and analysis procedure to return spatial frequency based instrument calibration. We show that the developed samples satisfy the characteristics of a test standard: functionality, ease of specification and fabrication, reproducibility, and low sensitivity to manufacturing error.
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页数：7
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