Nano-Crystalline Diamond Films with Pineapple-Like Morphology Grown by the DC Arcjet vapor Deposition Method

被引:1
|
作者
Li Bin [1 ]
Zhang Qin-Jian [2 ]
Shi Yan-Chao [3 ]
Li Jia-Jun [3 ]
Li Hong [1 ]
Lu Fan-Xiu [1 ]
Chen Guang-Chao [3 ]
机构
[1] Univ Sci & Technol Beijing, Sch Met & Ecol Engn, Beijing 100083, Peoples R China
[2] Beijing Jiaotong Univ, Sch Mech Elect & Control Engn, Beijing 100044, Peoples R China
[3] Univ Chinese Acad Sci, Coll Mat Sci & Optoelect Technol, Beijing 100049, Peoples R China
基金
中国国家自然科学基金;
关键词
NANOCRYSTALLINE DIAMOND; THIN-FILMS; ULTRANANOCRYSTALLINE DIAMOND; ELECTRICAL-PROPERTIES; CVD; METHANE; RAMAN; BIAS;
D O I
10.1088/0256-307X/31/8/088104
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
A nano-crystlline diamond film is grown by the dc arcjet chemical vapor deposition method. The film is characterized by scanning electron microscopy, high-resolution transmission electron microscopy (HRTEM), x-ray diffraction (XRD) and Raman spectra, respectively. The nanocrystalline grains are averagely with 80 nm in the size measured by XRD, and further proven by Raman and HRTEM. The observed novel morphology of the growth surface, pineapple-like morphology, is constructed by cubo-octahedral growth zones with a smooth faceted top surface and coarse side surfaces. The as-grown film possesses (100) dominant surface containing a little amorphous sp(2) component, which is far different from the nano-crystalline film with the usual cauliflower-like morphology.
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页数:3
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