Characterization of Diamond: Like Carbon Films Synthesized by DC-Plasma Enhanced Chemical Vapor Deposition

In this paper, diamond-like carbons were produced on tungsten and aluminum substrates by DC plasma enhanced chemical vapor deposition (DC-PECVD) system in a C2H2/H-2 gas mixture using C2H2 as source hydrocarbon and H-2 as etching and diluting gas. The operation pressure during the growth and substrates temperature were 15 Torr and 180A degrees C, respectively. Characterization of the DLCs deposited on tungsten and aluminum substrates were carried out by Fourier transform infrared (FTIR) spectroscopy, scanning electron microscopy (SEM), Raman spectroscopy and Atomic force microscopy (AFM). AFM analysis displayed that the DLCs grown on W substrate has lower roughness than the DLCs deposited on Al substrate and it was smoother. FTIR analysis indicates the existence of C-H vibration mode in the DLCs grown on both of substrates. The Raman spectroscopy shows G peak position and I(D)/I (G) ratio decreased for the DLCs grown on W substrate. The SEM images show diffuse and dense distribution of DLCs in Al and W substrate, respectively. These results shows that the optimum conditions were obtained on W substrate.