Fabrication of n-ZnSe/p-Si/n-Si heterojunction phototransistor using IR furnace chemical vapour deposition and its optical properties analysis

被引:5
|
作者
Chang, CC [1 ]
Wu, KT [1 ]
机构
[1] Natl Taiwan Ocean Univ, Dept Elect Engn, Keelung, Taiwan
来源
IEE PROCEEDINGS-OPTOELECTRONICS | 2000年 / 147卷 / 02期
关键词
D O I
10.1049/ip-opt:20000287
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An experimental study is presented involving the fabrication and analysis of a relatively new structure n-ZnSe/p-Si/n-Si heterojunction phototransistor having a high photo-current responsivity in the short-wavelength spectrum. Utilising photoluminescence :PL) spectroscopy and cyrosystems to investigate the optical characteristics of the grown ZnSe epilayer, the dominant emission peak was 444 nm (2.793 cV) with a FWHM of 28.3 mcV at 10 K due to near-band-edge (NBE) excitation emission. Group III element indium was selected as the n-type dopant for thermal diffusion on the ZnSe epilayer utilised to fabricate the studied device. The resulting photo-current responsivity was approximately 50 A/W at a bias voltage of V-CH = 15 V, with the highest photo-current responsivity occurring at a frequency of 470 nm. The study demonstrates that n-ZnSc/p-Si/n-Si heterojunction phototransistors are capable of functioning as short-wavelength photodetectors and have considerable potential in optoelectronic integrated circuit (OEIC) applications.
引用
收藏
页码:104 / 108
页数:5
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