p-Si/Macro-Assembled Graphene/n-Si Heterojunction Near-Infrared Photodetector

被引:4
|
作者
Chen, Yance [1 ]
Cao, Xiaoxue [1 ]
Wang, Suhao [3 ,4 ]
Liu, Lixiang [1 ]
Lv, Jianhang [1 ]
Liu, Xinyu [1 ]
Bodepudi, Srikrishna Chanakya [1 ]
Shen, Ying [2 ]
Sun, Haiyan [5 ]
Peng, Li [2 ]
Fang, Wenzhang [2 ]
Song, Jizhou [3 ,4 ]
Xu, Yang [1 ]
机构
[1] Zhejiang Univ, ZJU UIUC Joint Inst, ZJU Hangzhou Global Sci & Technol Innovat Ctr, State Key Lab Silicon Mat,Sch Micronano Elect, Hangzhou 310027, Peoples R China
[2] Zhejiang Univ, Int Res Ctr forPolymers 10, Dept Polymer Sci & Engn, MOE Key Lab Macromol Synth & Functionalizat, Hangzhou 310027, Peoples R China
[3] Zhejiang Univ, Soft Matter Res Ctr, Dept Engn Mech, Hangzhou 310027, Peoples R China
[4] Zhejiang Univ, Key Lab Soft Machines & Smart Devices Zhejiang Pro, Hangzhou 310027, Peoples R China
[5] Hangzhou Gaoxi Technol Co Ltd, Hangzhou 310027, Peoples R China
基金
中国博士后科学基金;
关键词
Macro-assembled graphene nanofilm (nMAG); photodetector; Schottky junction; silicon;
D O I
10.1109/TNANO.2022.3223371
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
p-type silicon (p-Si)/macro-assembled graphene nanofilm (nMAG)/n-type silicon (n-Si) heterojunction is utilized to fabricate near-infrared photodetector. Dual built-in electric fields were established in the same direction at the p-Si/nMAG and nMAG/n-Si heterojunctions, providing an enhanced electron-hole separation ability. The p-Si/nMAG/n-Si device has realized responsivities of 90 mA/W and 45 mA/W under 900 nm and 1064 nm illumination at room temperature and corresponding external quantum efficiency (EQE) of 11.8% and 5.2%, respectively, which is 30% and 45% higher than that of the single-junction nMAG/n-Si device. In this work, we applied two-dimensional (2D) carbon materials combined with monocrystalline silicon to explore complementary metal-oxide-semiconductor (CMOS) process-compatible device fabrication techniques, which paves the way to develop low-cost and large-scale near-infrared carbon-based photodetectors.
引用
收藏
页码:789 / 793
页数:5
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