Epitaxial Ferroelectric Hf0.5Zr0.5O2 with Metallic Pyrochlore Oxide Electrodes

被引：23

作者：

Zhang, Zimeng ^{[1
]}

Hsu, Shang-Lin ^{[2
,3
]}

Stoica, Vladimir A. ^{[4
]}

Paik, Hanjong ^{[5
,6
]}

Parsonnet, Eric ^{[7
]}

Qualls, Alexander ^{[7
]}

Wang, Jianjun ^{[8
]}

Xie, Liang ^{[1
]}

Kumari, Mukesh ^{[1
]}

Das, Sujit ^{[1
]}

Leng, Zhinan ^{[1
]}

McBriarty, Martin ^{[9
]}

Proksch, Roger ^{[10
]}

Gruverman, Alexei ^{[11
]}

Schlom, Darrell G. ^{[5
,6
,12
]}

Chen, Long-Qing ^{[8
]}

Salahuddin, Sayeef ^{[3
]}

Martin, Lane W. ^{[1
,13
]}

Ramesh, Ramamoorthy ^{[1
,3
,7
]}

机构：

[1] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA

[2] Natl Ctr Electron Microscopy, Mol Foundry, Lawrence Berkeley Natl Lab, Berkeley, CA 94720 USA

[3] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

[4] Argonne Natl Lab, Adv Photon Source, Lemont, IL 60439 USA

[5] Cornell Univ, Platform Accelerated Realizat Anal & Discovery In, Ithaca, NY 14853 USA

[6] Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA

[7] Univ Calif Berkeley, Dept Phys, Berkeley, CA 94720 USA

[8] Penn State Univ, Dept Mat Sci & Engn, University Pk, PA 16802 USA

[9] EMD Performance Mat, San Jose, CA 95134 USA

[10] Asylum Res, Goleta, CA 93117 USA

[11] Univ Nebraska, Dept Phys, Lincoln, NE 68588 USA

[12] Kavli Inst Cornell Nanoscale Sci, Ithaca, NY 14853 USA

[13] Lawrence Berkeley Natl Lab, Mat Sci Div, Berkeley, CA 94720 USA

来源：

ADVANCED MATERIALS | 2021年 / 33卷 / 10期

基金：

美国国家科学基金会;

关键词：

epitaxial growth; ferroelectrics; hafnia; PIEZORESPONSE FORCE MICROSCOPY; BISMUTH;

D O I：

10.1002/adma.202006089

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The synthesis of fully epitaxial ferroelectric Hf0.5Zr0.5O2 (HZO) thin films through the use of a conducting pyrochlore oxide electrode that acts as a structural and chemical template is reported. Such pyrochlores, exemplified by Pb2Ir2O7(PIO) and Bi2Ru2O7(BRO), exhibit metallic conductivity with room-temperature resistivity of <1 m omega cm and are closely lattice matched to yttria-stabilized zirconia substrates as well as the HZO layers grown on top of them. Evidence for epitaxy and domain formation is established with X-ray diffraction and scanning transmission electron microscopy, which show that the c-axis of the HZO film is normal to the substrate surface. The emergence of the non-polar-monoclinic phase from the polar-orthorhombic phase is observed when the HZO film thickness is >=approximate to 30 nm. Thermodynamic analyses reveal the role of epitaxial strain and surface energy in stabilizing the polar phase as well as its coexistence with the non-polar-monoclinic phase as a function of film thickness.

引用

页数：10

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