Buried interfaces in Mo/Si multilayers studied by soft-X-ray emission spectroscopy

被引：29
|
作者：
Miyata, N [1 ]
Ishikawa, S [1 ]
Yanagihara, M [1 ]
Watanabe, M [1 ]
机构：
[1] Tohoku Univ, Sci Measurements Res Inst, Aoba Ku, Sendai, Miyagi 9808577, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 11期
关键词：
soft-X-ray emission; Si L-23 emission; buried layer; buried interface; multilayer; synchrotron radiation; nondestructive analysis;
D O I：
10.1143/JJAP.38.6476
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We measured the Si L-23 soft-X-ray emission spectra for Mo/Si multilayers using monochromatized synchrotron radiation near the Si L-23 absorption threshold. On the basis of the spectral analysis, it was determined that the inter-faces of Mo/Si multilayers consist of Mo3Si interlayers of 0.8 +/- 0.1 nm in thickness. This study confirmed that soft-X-ray emission spectroscopy is a useful method of studying buried layers and interfaces nondestructively.
引用
收藏
页码：6476 / 6478
页数：3
相关论文
共 50 条
  • [41] SOFT-X-RAY EMISSION AND ABSORPTION IN DIAMOND
    LUBINSKY, AR
    ELLIS, DE
    PAINTER, GS
    PHYSICAL REVIEW B, 1975, 11 (08): : 3131 - 3138
  • [42] SOFT-X-RAY EMISSION STUDIES OF ADSORBATES
    WASSDAHL, N
    NILSSON, A
    WIELL, T
    TILLBORG, H
    DUDA, LC
    GUO, JH
    MARTENSSON, N
    NORDGREN, J
    ANDERSEN, JN
    NYHOLM, R
    PHYSICAL REVIEW LETTERS, 1992, 69 (05) : 812 - 815
  • [43] SOFT-X-RAY EMISSION AND CHROMOSPHERIC FLARES
    MACHADO, ME
    SOLAR PHYSICS, 1978, 60 (02) : 341 - 351
  • [44] SOFT-X-RAY EMISSION-SPECTROSCOPY USING SYNCHROTRON LIGHT EXCITATION
    CALLCOTT, TA
    EDERER, DL
    ARAKAWA, ET
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1984, 447 : 61 - 67
  • [45] Probe depth variation in grazing exit soft-X-ray emission spectroscopy
    Skytt, P
    Galander, B
    Nyberg, T
    Nordgren, J
    Isberg, P
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1997, 384 (2-3): : 558 - 562
  • [46] SOFT-X-RAY EMISSION-SPECTROSCOPY USING MONOCHROMATIZED SYNCHROTRON RADIATION
    NORDGREN, J
    BRAY, G
    CRAMM, S
    NYHOLM, R
    RUBENSSON, JE
    WASSDAHL, N
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (07): : 1690 - 1696
  • [47] ELECTRONIC-STRUCTURE OF AL AND SI DISSOLVED IN TRANSITION OR NOBLE-METALS STUDIED BY SOFT-X-RAY SPECTROSCOPY
    TANAKA, K
    MATSUMOTO, M
    MARUNO, S
    HIRAKI, A
    APPLIED PHYSICS LETTERS, 1975, 27 (10) : 529 - 531
  • [48] VALENCE-BAND DENSITY-OF-STATES OF THE IRON SILICIDES STUDIED BY SOFT-X-RAY EMISSION-SPECTROSCOPY
    KASAYA, M
    YAMAUCHI, S
    HIRAI, M
    KUSAKA, M
    IWAMI, M
    NAKAMURA, H
    WATABE, H
    JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1994, 63 (11) : 4097 - 4101
  • [49] SOFT-X-RAY SPECTROSCOPY OF FERROUS SILICATES
    DODD, CG
    RIBBE, PH
    PHYSICS AND CHEMISTRY OF MINERALS, 1978, 3 (02) : 145 - 162
  • [50] SOFT-X-RAY SPECTROSCOPY WITH TRANSMISSION GRATINGS
    PREDEHL, P
    X-RAY INSTRUMENTATION IN MEDICINE AND BIOLOGY, PLASMA PHYSICS, ASTROPHYSICS, AND SYNCHROTRON RADIATION, 1989, 1140 : 373 - 373
12345