Self-organized nanodot formation on InP(100) by oxygen ion sputtering

被引：11

作者：

Tan, S. K. ^{[1
]}

Liu, R. ^{[1
]}

Sow, C. H. ^{[1
]}

Wee, A. T. S. ^{[1
]}

机构：

[1] Natl Univ Singapore, Dept Phys, Singapore 117542, Singapore

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2006年 / 248卷 / 01期

关键词：

ion beam sputtering; nanodots; InP;

D O I：

10.1016/j.nimb.2006.03.170

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We demonstrate the formation of ordered nanodot chains with dot size less than 100 nm by 1 keV O-2(+) beam sputtering on InP(100). The ordered nanodot chains are perpendicularly aligned to the ion beam direction, and are formed at 38 degrees and 44 degrees incidence with ion current density of 100 mu A cm(-2). At 56 degrees and 62 degrees incidence, the nanodot chains formed are shorter and more coarse, and the periodicity of the nanodot chains is suppressed. XPS analysis show that the surface of nanodots formed comprise In2O3 and various InP oxides; and is In2O3-rich due to the preferential sputtering of P atoms. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：83 / 89

页数：7

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