ZnO as a dielectric for organic thin film transistor-based non-volatile memory

被引:15
|
作者
Salim, N. Tjitra [2 ]
Aw, K. C. [1 ]
Gao, W. [2 ]
Li, Z. W. [2 ]
Wright, B. [3 ]
机构
[1] Univ Auckland, Dept Mech Engn, Auckland 1001, New Zealand
[2] Univ Auckland, Dept Chem & Mat Engn, Auckland 1001, New Zealand
[3] Univ Auckland, Dept Chem, Auckland 1001, New Zealand
关键词
ZnO; OTFT; Non-volatile memory; Pentacene; FIELD-EFFECT TRANSISTORS; INSULATORS;
D O I
10.1016/j.mee.2009.02.034
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper demonstrates the novel application of d.c. sputtered zinc oxide (ZnO) as a charge trapping dielectric material for the application of an organic thin film transistor (OTFT) based non-volatile memory (NVM). The motivation of using ZnO as a dielectric is due to its chemical stability and optical transparency, enabling future development of transparent electronic devices. Unbalanced magnetron d.c. sputtering with Ar:O-2 ratio of 80:20 was used to obtained a ZnO dielectric of 50 nm thick. The ZnO has an optical band gap of 3.23 eV, resistivity and k-value of 5 x 10(7) Omega-cm and 50, respectively. The ZnO sandwiched between two layers of low-k methyl-silsesquioxane (MSQ) sol-gel dielectric creates a triple layer dielectric structure for charge storage. A solution-processable pentacene, 13,6-N-Sulfinylacetamodipentacene, was used as an active layer of an OTFT-NVM. It has been successfully demonstrated that this OTFT-NVM can be electrically programmed and erased at a low voltage. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:2127 / 2131
页数:5
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