Surface and interface of GaAs/Sl-GaAs structures investigated by photoreflectance spectroscopy

被引:3
|
作者
Jezierski, K [1 ]
Sitarek, P [1 ]
Misiewicz, J [1 ]
Panek, M [1 ]
Sciana, B [1 ]
Korbutowicz, R [1 ]
Tlaczala, M [1 ]
机构
[1] WROCLAW TECH UNIV,INST ELECTRON TECHNOL,PL-50370 WROCLAW,POLAND
关键词
D O I
10.1016/S0042-207X(96)00273-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Epitaxial layers of GaAs were grown by MOCVD technique on SI-GaAs substrates. Photoreflectance (PR) spectra were measured at room temperature for energies in the vicinity of the E(0) critical point for p-type as well as n-type doped GaAs/SI-GaAs structures. Two experimental methods for the further investigation of the obtained PR spectra were proposed. The first method was based on the gradual chemical etching of the doped epilayer, the second on the PR measurements carried out for different wavelengths of the laser pump beam. Depending on the doping concentration, the existence of two PR subsignals was observed: the first arises from the surface space charge region, the second from the interface region. In the computational analysis of measured PR spectra Kramers-Kronig analysis of the complex photoreflectance function was applied. (C) 1997 Elsevier Science Ltd.
引用
收藏
页码:277 / 282
页数:6
相关论文
共 50 条
  • [21] 2D hole gas in GaAs/(AlGa)As heterostructures investigated by photoreflectance spectroscopy
    Sitarek, P
    Misiewicz, J
    Hansen, OP
    SOLID STATE CRYSTALS IN OPTOELECTRONICS AND SEMICONDUCTOR TECHNOLOGY, 1997, 3179 : 129 - 132
  • [22] Investigation of Built-in Electric Fields at the GaSe/GaAs Interface by Photoreflectance Spectroscopy
    O. S. Komkov
    S. A. Khakhulin
    D. D. Firsov
    P. S. Avdienko
    I. V. Sedova
    S. V. Sorokin
    Semiconductors, 2020, 54 : 1198 - 1204
  • [23] Investigation of Built-in Electric Fields at the GaSe/GaAs Interface by Photoreflectance Spectroscopy
    Komkov, O. S.
    Khakhulin, S. A.
    Firsov, D. D.
    Avdienko, P. S.
    Sedova, I., V
    Sorokin, S., V
    SEMICONDUCTORS, 2020, 54 (10) : 1198 - 1204
  • [24] PHOTOREFLECTANCE SPECTROSCOPY OF MOCVD GROWN GAAS EPILAYERS
    MISIEWICZ, J
    MARKIEWICZ, P
    REBISZ, J
    GUMIENNY, Z
    PANEK, M
    SCIANA, B
    TLACZALA, M
    PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1994, 183 (02): : K43 - K46
  • [25] 高能Si+注入Sl-GaAs形成n型埋层
    姬成周
    李国辉
    吴瑜光
    罗晏
    王琦
    王文勋
    固体电子学研究与进展, 1991, (03) : 245 - 249
  • [26] PHOTOREFLECTANCE SPECTRA FROM THE SURFACE AND GAAS/GAAS INTERFACES OF DOPED MBE GAAS FILMS
    WANG, ZH
    PAN, SH
    HUANG, S
    ZHANG, CZ
    MU, SM
    ZHOU, XC
    JIAN, J
    XU, GC
    CHEN, ZK
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (09) : 1493 - 1498
  • [27] Evaluation of strained piezoelectric InGaAs/GaAs QW structures grown on (111)B GaAs by Photoreflectance spectroscopy.
    Cho, SH
    Majerfeld, A
    Sánchez, JJ
    Muñoz, E
    Izpura, I
    2001 IEEE INTERNATIONAL SYMPOSIUM ON COMPOUND SEMICONDUCTORS, 2000, : 273 - 278
  • [28] Photoreflectance spectroscopy of semiconductor structures at hydrostatic pressure: A comparison of GaInAs/GaAs and GaInNAs/GaAs single quantum wells
    Kudrawiec, R.
    Misiewicz, J.
    APPLIED SURFACE SCIENCE, 2006, 253 (01) : 80 - 84
  • [29] QUALIFICATION OF OMVPE ALGAAS/GAAS HBT STRUCTURES USING NONDESTRUCTIVE PHOTOREFLECTANCE SPECTROSCOPY
    BOTTKA, N
    GASKILL, DK
    WRIGHT, PD
    KALISKI, RW
    WILLIAMS, DA
    JOURNAL OF CRYSTAL GROWTH, 1991, 107 (1-4) : 893 - 897
  • [30] Photoreflectance investigations of GaAs/AlGaAs complex structures
    Sek, G
    Misiewicz, J
    Kaniewska, M
    Reginski, K
    Muszalski, J
    VACUUM, 1997, 48 (3-4) : 283 - 287