MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

被引：60
|
作者：
Liu, Lin [1 ]
Wang, Erkang [1 ]
Zhang, Xiaoyang [1 ]
Liang, Wenxuan [2 ]
Li, Xingde [2 ]
Xie, Huikai [1 ]
机构：
[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA
[2] Johns Hopkins Univ, Dept Biomed Engn, Baltimore, MD 21205 USA
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2014年 / 215卷
基金：
美国国家科学基金会; 美国国家卫生研究院;
关键词：
3D confocal imaging; 3D microendoscope; MEMS mirror; MEMS tunable lens; Electrothermal actuator; Bimorph; MINIATURE OBJECTIVE LENS; MICROSCOPE; DEPTH;
D O I：
10.1016/j.sna.2013.09.035
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over +/- 26 degrees with a 2D MEMS scanning micromirror and a depth scan of over 400 mu m with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 mu m and 7.0 mu m, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码：89 / 95
页数：7
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