MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

被引：60
|
作者：
Liu, Lin [1 ]
Wang, Erkang [1 ]
Zhang, Xiaoyang [1 ]
Liang, Wenxuan [2 ]
Li, Xingde [2 ]
Xie, Huikai [1 ]
机构：
[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA
[2] Johns Hopkins Univ, Dept Biomed Engn, Baltimore, MD 21205 USA
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2014年 / 215卷
基金：
美国国家科学基金会; 美国国家卫生研究院;
关键词：
3D confocal imaging; 3D microendoscope; MEMS mirror; MEMS tunable lens; Electrothermal actuator; Bimorph; MINIATURE OBJECTIVE LENS; MICROSCOPE; DEPTH;
D O I：
10.1016/j.sna.2013.09.035
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over +/- 26 degrees with a 2D MEMS scanning micromirror and a depth scan of over 400 mu m with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 mu m and 7.0 mu m, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码：89 / 95
页数：7
相关论文
共 50 条
  • [41] 3D reconstruction of structured light based on infrared MEMS
    Huang, Huiming
    Liu, Guihua
    Duan, Kangrong
    Yuan, Jianyin
    JOURNAL OF LASER APPLICATIONS, 2021, 33 (04)
  • [42] Microassembly of Complex and Solid 3D MEMS by 3D Vision-based Control
    Tamadazte, Brahim
    Le Fort-Piat, Nadine
    Dembele, Sounkalo
    Marchand, Eric
    2009 IEEE-RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS, 2009, : 3284 - 3289
  • [43] Angle extended linear MEMS scanning system for 3D laser vision sensor
    Pang, Yajun
    Zhang, Yinxin
    Yang, Huaidong
    Zhu, Pan
    Gai, Ye
    Zhao, Jian
    Huang, Zhanhua
    INFRARED PHYSICS & TECHNOLOGY, 2016, 78 : 129 - 132
  • [44] Feasibility study of MEMS-based stenosis detection using a prototypical catheter design with intravascular scanning probes (IVSPs)
    Han, Suyong
    Kim, Woojin
    Kim, Yongdae
    MEDICAL ENGINEERING & PHYSICS, 2023, 117
  • [45] MEMS-based self-referencing cascaded line-scan camera using single-pixel detectors
    Li, Liang
    Qi, Yi
    Lim, Zi Heng
    Zhou, Guangcan
    Chau, Fook Siong
    Zhou, Guangya
    OPTICS EXPRESS, 2019, 27 (18): : 25457 - 25469
  • [46] Holographic 3D display using MEMS spatial light modulator
    Takaki, Yasuhiro
    THREE-DIMENSIONAL IMAGING, VISUALIZATION, AND DISPLAY 2012, 2012, 8384
  • [47] Underwater 3D Scanner Model Using a Biaxial MEMS Mirror
    Castillon, Miguel
    Palomer, Albert
    Forest, Josep
    Ridao, Pere
    IEEE ACCESS, 2021, 9 : 50231 - 50243
  • [48] Novel 3D displays using micro-optics and MEMS
    Urey, Hakan
    Aksit, Kaan
    Eldes, Osman
    2012 INTERNATIONAL CONFERENCE ON FIBER OPTICS AND PHOTONICS (PHOTONICS), 2012,
  • [49] Application of laser scanning confocal microscopy in the soft tissue exquisite structure for 3D scan
    Zhang, Zhaoqiang
    Ibrahim, Mohamed
    Fu, Yang
    Wu, Xujia
    Ren, Fei
    Chen, Lei
    INTERNATIONAL JOURNAL OF BURNS AND TRAUMA, 2018, 8 (02): : 17 - 25
  • [50] A MEMS-based real-time structured light 3-D measuring architecture on FPGA
    Zhou, Wenbiao
    Jia, Yunfei
    Fan, Luyao
    Fan, Gongyu
    Lu, Fengchi
    JOURNAL OF REAL-TIME IMAGE PROCESSING, 2024, 21 (03)
12345