MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan

被引：60

作者：

Liu, Lin ^{[1
]}

Wang, Erkang ^{[1
]}

Zhang, Xiaoyang ^{[1
]}

Liang, Wenxuan ^{[2
]}

Li, Xingde ^{[2
]}

Xie, Huikai ^{[1
]}

机构：

[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA

[2] Johns Hopkins Univ, Dept Biomed Engn, Baltimore, MD 21205 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2014年 / 215卷

基金：

美国国家科学基金会; 美国国家卫生研究院;

关键词：

3D confocal imaging; 3D microendoscope; MEMS mirror; MEMS tunable lens; Electrothermal actuator; Bimorph; MINIATURE OBJECTIVE LENS; MICROSCOPE; DEPTH;

D O I：

10.1016/j.sna.2013.09.035

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over +/- 26 degrees with a 2D MEMS scanning micromirror and a depth scan of over 400 mu m with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 mu m and 7.0 mu m, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：89 / 95

页数：7

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