Design Aspects of 3D Integration of MEMS-based Systems

被引：0
|
作者：
Schneider, Peter [1 ]
Reitz, Sven [1 ]
Stolle, Joern [1 ]
Martin, Roland [1 ]
机构：
[1] Fraunhofer Inst Integrated Circuits, Div Design Automat, Dresden, Saxony, Germany
来源：
DTIP 2009: SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS | 2009年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Due to high integration density the influence of manufacturing technologies on the system behavior has to be considered in the design process of 3D systems. Therefore, information from different physical domains has to be provided to designers. The variety of structures and physical effects requires efficient modeling approaches and simulation algorithms. In the following a modular approach which covers detailed analysis with PDE solvers and more abstract behavioral modeling is described.
引用
收藏
页码：92 / 97
页数：6
相关论文
共 50 条
  • [1] MEMS-Based 3D Optical Microendoscopy
    Xie, Huikai
    [J]. 2009 ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY, VOLS 1-20, 2009, : 6703 - 6705
  • [2] Design on MEMS-based 3D biochip for drug-released dispenser
    Hsiang-Chen Hsu
    Li-Ming Chu
    Baojun Liu
    Chien-Yuan Lai
    [J]. Microsystem Technologies, 2017, 23 : 355 - 360
  • [3] Optical design for uniform scanning in MEMS-based 3D imaging lidar
    Lee, Xiaobao
    Wang, Chunhui
    [J]. APPLIED OPTICS, 2015, 54 (09) : 2219 - 2223
  • [4] Design on MEMS-based 3D biochip for drug-released dispenser
    Hsu, Hsiang-Chen
    Chu, Li-Ming
    Liu, Baojun
    Lai, Chien-Yuan
    [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2017, 23 (02): : 355 - 360
  • [5] Robust estimation design of MEMS-based integration inertial navigation systems
    Chen, Yung-Yue
    Chang, Shyang-Jye
    Yu, Ren-Yuan
    Huang, Chiung-Yau
    [J]. IECON 2006 - 32ND ANNUAL CONFERENCE ON IEEE INDUSTRIAL ELECTRONICS, VOLS 1-11, 2006, : 2754 - +
  • [6] 3D Integration Technologies for MEMS/IC Systems
    Ramm, Peter
    Klumpp, Armin
    Weber, Josef
    [J]. PROCEEDINGS OF THE 2009 BIPOLAR/BICMOS CIRCUITS AND TECHNOLOGY MEETING, 2009, : 138 - 141
  • [7] Uniaxial MEMS-based 3D reconstruction using pixel refinement
    Han, Min
    Lei, Fengxiao
    Shi, Weijian
    Lu, Shihao
    Li, Xinghui
    [J]. OPTICS EXPRESS, 2023, 31 (01) : 536 - 554
  • [8] 3D INTEGRATION OF MEMS AND IC: DESIGN, TECHNOLOGY AND SIMULATIONS
    Taklo, Maaike M. V.
    Schjolberg-Henriksen, Kari
    Lietaer, Nicolas
    Prainsack, Josef
    Elfving, Anders
    Weber, Josef
    Klein, Matthias
    Schneider, Peter
    Reitz, Sven
    [J]. ADVANCED MATERIALS AND TECHNOLOGIES FOR MICRO/NANO-DEVICES, SENSORS AND ACTUATORS, 2010, : 191 - +
  • [9] Integration of Legal Aspects in 3D Cadastral Systems
    El-Mekawy, Mohamed Sobaih Aly
    Paasch, Jesper M.
    Paulsson, Jenny
    [J]. INTERNATIONAL JOURNAL OF E-PLANNING RESEARCH, 2015, 4 (03) : 47 - 71
  • [10] A novel calibration method for a uniaxial MEMS-based 3D reconstruction system
    Han, Min
    Lei, Fengxiao
    Tao, Yihao
    Shi, Weijian
    Lu, Shihao
    Tian, Haoyang
    Liao, Chengwei
    Zhu, Peiyuan
    Zhu, Shidong
    Wang, Xiaohao
    Li, Xinghui
    [J]. OPTOELECTRONIC IMAGING AND MULTIMEDIA TECHNOLOGY IX, 2022, 12317
12345