Penetrative imaging of sub-surface microstructures with a near-field microwave microscope

被引：10

作者：

Sun, Weiqiang ^{[1
,2
]}

Yang, Yong ^{[1
,3
]}

Wu, Zhe ^{[4
,5
]}

Feng, Tao ^{[1
]}

Zhuang, Qianwei ^{[1
]}

Peng, Lian-Mao ^{[1
]}

Xu, Shengyong ^{[1
]}

Ong, Chong Kim ^{[5
]}

机构：

[1] Peking Univ, Dept Elect, Key Lab Phys & Chem Nanodevices, Beijing 100871, Peoples R China

[2] Natl Univ Singapore, Singapore Synchrotron Light Source, Singapore 117603, Singapore

[3] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

[4] Univ Elect Sci & Technol China, Sch Phys Elect, Natl Lab Vacuum Elect, Chengdu 610054, Peoples R China

[5] Natl Univ Singapore, Dept Phys, Ctr Superconducting & Magnet Mat, Singapore 117542, Singapore

来源：

JOURNAL OF APPLIED PHYSICS | 2014年 / 116卷 / 04期

关键词：

RESOLUTION;

D O I：

10.1063/1.4891215

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Microwaves have the capability of penetrating through materials with low permittivity. By means of a near-field scanning microwave microscope system, we obtained two-dimensional maps of the incident microwave's reflection coefficient intensity and frequency shift, which correspond well to the spatial distribution and electrical conductance of fluids and metallic thin film structures hidden underneath 15-170 mu m thick dielectric covers. The lateral resolution and sensitivity to conductivity for the target samples were found closely related to the thickness of the cover layer. The technique offers a real-time, in-situ, and a non-invasive approach to monitor the local chemical reactions, the motion of fluids, and the distribution or concentrations of ions or bio-materials in lab-on-a-chip systems. This technique also has the potential to be developed for the detection of live cells and tissues. (C) 2014 AIP Publishing LLC.

引用

页数：9

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