Sub-surface Spatial Resolution of a Near-field Scanning Microwave Microscope

被引：0
|
作者：
Estes, Nicholas [1 ]
Chisum, Jonathan [1 ]
机构：
[1] Univ Notre Dame, Elect Engn Dept, Notre Dame, IN 46556 USA
来源：
PROCEEDINGS OF THE 2016 IEEE NATIONAL AEROSPACE AND ELECTRONICS CONFERENCE (NAECON) AND OHIO INNOVATION SUMMIT (OIS) | 2016年
关键词：
microscopy; near-field; trusted electronics; sub-surface; resolution;
D O I：
暂无
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
Scanning near-field microwave microscopy (SMM) provides high spatial resolution material and device characterization that is sensitive to complex permittivity and permeability at depth. We analyze spatial resolution at depth for arbitrary SMMs by combining full-wave electromagnetics and image formation theory then demonstrate the method by comparing two standard probe tips.
引用
收藏
页码：464 / 467
页数：4
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