Optimization of a glancing angle for simultaneous trace elemental analysis by using a portable total reflection X-ray fluorescence spectrometer

被引:10
|
作者
Kunimura, Shinsuke [1 ]
Watanabe, Daisuke [1 ]
Kawai, Jun [1 ]
机构
[1] Kyoto Univ, Dept Mat Sci & Engn, Sakyo Ku, Kyoto 6068501, Japan
关键词
Portable spectrometer; Total reflection X-ray fluorescence; Detection limit; Nanogram; Glancing angle; SYNCHROTRON-RADIATION; WAFER SURFACES;
D O I
10.1016/j.sab.2009.02.004
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
By using a portable total reflection X-ray fluorescence spectrometer with a 1 W X-ray tube, a specimen containing nanograms of Ca, Sc, Ti, V, Cr, Mn, Fe. and Ni is measured at several glancing angles of incident X-rays. continuum X-rays are used as the excitation Source. The intensities of the spectral background which degrades sensitivity to trace elements are decreased with a decrease of the glancing angle, and all these elements are detected at the glancing angle of 0.13 degrees smaller than the critical angle for total reflection of the incident X-rays (0.20 degrees). An optimum glancing angle for simultaneously detecting these trace elements is around 0.13 degrees, and detection limits at 0.13 degrees are sub-nanograms to ten nanograms. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:288 / 290
页数:3
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