共 50 条
- [33] A HUMIDITY SENSOR WITH HIGH SENSITIVITY AND LOW TEMPERATURE COEFFICIENT OF FREQUENCY BASED ON ALN SURFACE ACOUSTIC WAVE AND GRAPHENE OXIDE SENSING LAYER [J]. 2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2017, : 210 - 213
- [34] Force microscopy for the investigation of high-frequency surface acoustic wave devices [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1998, 66 (Suppl 1): : S325 - S328
- [37] Force microscopy for the investigation of high-frequency surface acoustic wave devices [J]. Applied Physics A, 1998, 66 : S325 - S328
- [39] Surface Acoustic Wave sensor based on AlN/Sapphire structure for high temperature and high frequency applications [J]. 2011 IEEE SENSORS, 2011, : 610 - 613