Force microscopy for the investigation of high-frequency surface acoustic wave devices

被引:0
|
作者
T. Hesjedal
H.-J. Fröhlich
E. Chilla
机构
[1] Paul-Drude Institute for Solid State Electronics,
[2] Hausvogteiplatz 5–7,undefined
[3] D-10117 Berlin,undefined
[4] Germany (Fax: +49-30/20377-257,undefined
[5] E-mail: e.chilla@pdi-berlin.de),undefined
来源
Applied Physics A | 1998年 / 66卷
关键词
PACS: 43.38.+n, 85.50.+k; 61.16.Ch;
D O I
暂无
中图分类号
学科分类号
摘要
and quartz, and being operated at frequencies around 600 MHz. By employing SAFM, the local influence of the electrodes on the wave field, leading to undesired performance losses, was investigated.
引用
收藏
页码:S325 / S328
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