A HUMIDITY SENSOR WITH HIGH SENSITIVITY AND LOW TEMPERATURE COEFFICIENT OF FREQUENCY BASED ON ALN SURFACE ACOUSTIC WAVE AND GRAPHENE OXIDE SENSING LAYER

被引：0

作者：

Le, Xianhao ^{[1
]}

Ding, Hong ^{[1
]}

Pang, Jintao ^{[1
]}

Wang, Yixiang ^{[1
]}

Xie, Jin ^{[1
]}

机构：

[1] Zhejiang Univ, State Key Lab Fluid Power & Mechatron Syst, Hangzhou 310027, Zhejiang, Peoples R China

来源：

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2017年

基金：

中国国家自然科学基金;

关键词：

Humidity sensor; surface acoustic wave; AlN thin film; highly doped Si; graphene oxide; FILM;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a humidity sensor based on AlN surface acoustic wave (SAW) device coated with graphene oxide (GO) as sensing layer. Utilizing a layered structure consisted of a thin AlN layer and a highly doped Si substrate layer, the temperature coefficient of frequency (TCF) of the sensor is found to be around -22.1 ppm/degrees C, much smaller than conventional SAW humidity sensors. Moreover, the sensor has a wide detection range from 5% to 95% RH and shows high sensitivity up to 420.8 kHz/10% RH at 90% RH. Little hysteresis, excellent repeatability, fast response and short recovery time of the sensor are obtained. The sensor also has a good stability in a period of 28 days.

引用

页码：210 / 213

页数：4

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