Fast Response and High Sensitivity ZnO/glass Surface Acoustic Wave Humidity Sensors Using Graphene Oxide Sensing Layer

被引：0

作者：

Weipeng Xuan

Mei He

Nan Meng

Xingli He

Wenbo Wang

Jinkai Chen

Tianjin Shi

Tawfique Hasan

Zhen Xu

Yang Xu

J. K. Luo

机构：

[1] Dept. of Info. Sci. & Electric. Eng.,MOE Key Lab. of Macromolecul. Synth. & Funct., Dept. of Polym. Sci. & Eng.

[2] Zhejiang University and Cyrus Tang Center for Sensor Materials and Applications,undefined

[3] Cambridge Graphene Centre,undefined

[4] University of Cambridge,undefined

[5] Zhejiang University,undefined

[6] Inst. of Renew. Energ. & Environ. Technol.,undefined

[7] University of Bolton,undefined

来源：

Scientific Reports | / 4卷

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摘要：

We report ZnO/glass surface acoustic wave (SAW) humidity sensors with high sensitivity and fast response using graphene oxide sensing layer. The frequency shift of the sensors is exponentially correlated to the humidity change, induced mainly by mass loading effect rather than the complex impedance change of the sensing layer. The SAW sensors show high sensitivity at a broad humidity range from 0.5%RH to 85%RH with < 1 sec rise time. The simple design and excellent stability of our GO-based SAW humidity sensors, complemented with full humidity range measurement, highlights their potential in a wide range of applications.

引用

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