Fast Response and High Sensitivity ZnO/glass Surface Acoustic Wave Humidity Sensors Using Graphene Oxide Sensing Layer

被引：147
|
作者：
Xuan, Weipeng [1 ,2 ]
He, Mei [1 ,2 ]
Meng, Nan [1 ,2 ]
He, Xingli [1 ,2 ]
Wang, Wenbo [1 ,2 ]
Chen, Jinkai [1 ,2 ]
Shi, Tianjin [1 ,2 ]
Hasan, Tawfique [3 ]
Xu, Zhen [4 ]
Xu, Yang [1 ,2 ]
Luo, J. K. [1 ,2 ,5 ]
机构：
[1] Zhejiang Univ, Dept Info Sci & Elect Eng, Hangzhou 310027, Zhejiang, Peoples R China
[2] Cyrus Tang Ctr Sensor Mat & Applicat, Hangzhou 310027, Zhejiang, Peoples R China
[3] Univ Cambridge, Cambridge Graphene Ctr, Cambridge CB3 0FA, England
[4] Zhejiang Univ, Dept Polym Sci & Eng, MOE Key Lab Macromol Synth & Funct, Hangzhou 310027, Zhejiang, Peoples R China
[5] Univ Bolton, Inst Renew Energ & Environ Technol, Bolton BL3 5AB, England
来源：
SCIENTIFIC REPORTS | 2014年 / 4卷
关键词：
RAMAN-SPECTRA; GAS SENSORS; FILM; CONDUCTIVITY; ZNO; CHEMISTRY; DEVICES;
D O I：
10.1038/srep07206
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
We report ZnO/glass surface acoustic wave (SAW) humidity sensors with high sensitivity and fast response using graphene oxide sensing layer. The frequency shift of the sensors is exponentially correlated to the humidity change, induced mainly by mass loading effect rather than the complex impedance change of the sensing layer. The SAW sensors show high sensitivity at a broad humidity range from 0.5% RH to 85% RH with <1 sec rise time. The simple design and excellent stability of our GO-based SAW humidity sensors, complemented with full humidity range measurement, highlights their potential in a wide range of applications.
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页数：9
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