Introduction to the Focused Section on Mechatronics for MEMS and NEMS

被引：4
|
作者：
Jalili, Nader [1 ]
Liu, Peter X. [2 ]
Alici, Gursel [3 ]
Ferreira, Antoine [4 ]
机构：
[1] Clemson Univ, Dept Mech Engn, Clemson, SC 29634 USA
[2] Carleton Univ, Dept Syst & Comp Engn, Ottawa, ON K1S 5B6, Canada
[3] Univ Wollongong, Sch Mech Mat & Mechatron Engn, Wollongong, NSW 2522, Australia
[4] Ecole Natl Super Ingn Bourges, Interact Robot Syst Team, Inst Pluridisciplinaire Rech Ingenierie Syst, Inst PRISME, F-18000 Bourges, France
来源：
IEEE-ASME TRANSACTIONS ON MECHATRONICS | 2009年 / 14卷 / 04期
关键词：
HARD-DISK DRIVES; DUAL-STAGE SERVO; ELECTROSTATIC ACTUATORS; MAGNETIC-LEVITATION; MOTION CONTROL; MICROMANIPULATION; DESIGN; SYSTEM; MICROMECHATRONICS; MICROACTUATORS;
D O I：
10.1109/TMECH.2009.2026008
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：397 / 404
页数：8
相关论文
共 50 条
  • [41] Introduction to the focused section on advanced integrated mechatronic
    Huang, Han-Pang
    Cheng, Fan-Tien
    IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2007, 12 (03) : 233 - 235
  • [42] Tribological challenges in MEMS/NEMS devices
    Patton, Steven T.
    Voevodin, Andrey A.
    PROCEEDINGS OF THE ASME/STLE INTERNATIONAL JOINT TRIBOLOGY CONFERENCE, PTS A AND B, 2008, : 857 - 859
  • [43] Microfluidics, MEMS/NEMS, Sensors and Devices
    Khosla, Ajit
    Hesketh, Peter J.
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2014, 161 (02) : Y1 - Y1
  • [44] MEMS/NEMS for Biosensing [Guest Editorial]
    Ji, Jianlong
    Xiang, Nan
    IEEE NANOTECHNOLOGY MAGAZINE, 2025, 19 (01) : 3 - 3
  • [45] Hybrid Lithography System for MEMS/NEMS
    Chen, Linsen
    Pu, Donglin
    Hu, Jin
    Ye, Yan
    Zhu, Pengfei
    2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013), 2013, : 304 - 307
  • [46] Thermoelectric Materials in MEMS and NEMS: A Review
    Roncaglia, Alberto
    Ferri, Matteo
    SCIENCE OF ADVANCED MATERIALS, 2011, 3 (03) : 401 - 419
  • [47] Controlling Casimir forces in MEMS and NEMS
    Esquivel-Sirvent, R
    Villarreal, C
    NANO-AND MICROELECTROMECHANICAL SYSTEMS (NEMS AND MEMS) AND MOLECULAR MACHINES, 2003, 741 : 135 - 137
  • [48] The Recent Progress of MEMS/NEMS Resonators
    Wei, Lei
    Kuai, Xuebao
    Bao, Yidi
    Wei, Jiangtao
    Yang, Liangliang
    Song, Peishuai
    Zhang, Mingliang
    Yang, Fuhua
    Wang, Xiaodong
    MICROMACHINES, 2021, 12 (06)
  • [49] Stencil lithography for bridging MEMS and NEMS
    Ali, Basit
    Karimzadehkhouei, Mehrdad
    Esfahani, Mohammad Nasr
    Leblebici, Yusuf
    Alaca, B. Erdem
    MICRO AND NANO ENGINEERING, 2023, 19
  • [50] Suspended Graphene applications in NEMS and MEMS
    Shrestha, Surendra
    Ranjit, Smriti
    2016 13TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING/ELECTRONICS, COMPUTER, TELECOMMUNICATIONS AND INFORMATION TECHNOLOGY (ECTI-CON), 2016,
12345