Introduction to the Focused Section on Mechatronics for MEMS and NEMS

被引：4
|
作者：
Jalili, Nader [1 ]
Liu, Peter X. [2 ]
Alici, Gursel [3 ]
Ferreira, Antoine [4 ]
机构：
[1] Clemson Univ, Dept Mech Engn, Clemson, SC 29634 USA
[2] Carleton Univ, Dept Syst & Comp Engn, Ottawa, ON K1S 5B6, Canada
[3] Univ Wollongong, Sch Mech Mat & Mechatron Engn, Wollongong, NSW 2522, Australia
[4] Ecole Natl Super Ingn Bourges, Interact Robot Syst Team, Inst Pluridisciplinaire Rech Ingenierie Syst, Inst PRISME, F-18000 Bourges, France
来源：
IEEE-ASME TRANSACTIONS ON MECHATRONICS | 2009年 / 14卷 / 04期
关键词：
HARD-DISK DRIVES; DUAL-STAGE SERVO; ELECTROSTATIC ACTUATORS; MAGNETIC-LEVITATION; MOTION CONTROL; MICROMANIPULATION; DESIGN; SYSTEM; MICROMECHATRONICS; MICROACTUATORS;
D O I：
10.1109/TMECH.2009.2026008
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：397 / 404
页数：8
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