Measurement of shock waves velocity in the air plasma of capacitively coupled RF discharge

被引：7
|
作者：
Dubinov, AE [1 ]
Sadovoy, SA
Selemir, VD
机构：
[1] Moscow Engineer Phys Inst, Branch 4, Sarov 16, Arzamas, Russia
[2] All Russia Sci Res Inst Expt Phys, Russian Fed Nucl Ctr, Sarov 16, Arzamas, Russia
来源：
SHOCK WAVES | 2000年 / 10卷 / 01期
关键词：
shock wave; capacitively coupled RF discharge; charged particle concentration;
D O I：
10.1007/s001930050180
中图分类号：
O3 [力学];
学科分类号：
08 ; 0801 ;
摘要：
The velocity of shock wave propagation in the air plasma of stationary capacitively coupled RF discharge at different gas pressure and charged particles concentration has been measured. It is shown, that the velocity of the shock wave increases at the increase of the concentration. Measurement results are brought to the universal dependence.
引用
收藏
页码：73 / 76
页数：4
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