MODELING OF CAPACITIVELY COUPLED RF DISCHARGE WITH NON-SINUSOIDAL CURRENT WAVEFORM

被引：0
|
作者：
Shivkumar, Gayathri [1 ]
Tholeti, Siva Sashank [1 ]
Macheret, Sergey O. [1 ]
Alexeenko, Alina A. [1 ]
Alrefae, Majed A. [2 ]
Fisher, Timothy S. [2 ]
机构：
[1] Purdue Univ, Sch Aeronaut & Astronaut, W Lafayette, IN 47907 USA
[2] Purdue Univ, Sch Mech Engn, W Lafayette, IN 47907 USA
来源：
2017 IEEE INTERNATIONAL CONFERENCE ON PLASMA SCIENCE (ICOPS) | 2017年
关键词：
D O I：
暂无
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
TU 1.1-4
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页数：1
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