Simulation of electron moving in RF capacitively coupled discharge

被引：4
|
作者：
Askhatov, R. M. [1 ]
Badriev, I. B. [1 ]
Chebakova, V. Yu [1 ]
Zheltukhin, V. S. [2 ]
机构：
[1] Kazan Fed Univ, 18 Kremlevskaya St, Kazan 420008, Russia
[2] Kazan State Technol Univ, 68 Karl Marx St, Kazan 420015, Russia
来源：
SCIENTIFIC TECHNICAL CONFERENCE ON LOW TEMPERATURE PLASMA DURING THE DEPOSITION OF FUNCTIONAL COATINGS (LTP COATINGS 2017) | 2018年 / 1058卷
基金：
俄罗斯科学基金会;
关键词：
MONTE-CARLO-SIMULATION; TRANSPORT; PLASMA;
D O I：
10.1088/1742-6596/1058/1/012044
中图分类号：
O3 [力学];
学科分类号：
08 ; 0801 ;
摘要：
An algorithm of simulation of kinetic movement of electrons in alternating-current field of radio-frequency capacitively coupled discharge is presented in the paper. The results of solving of modelling problems are presented also.
引用
收藏
页数：4
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