Measurement of shock waves velocity in the air plasma of capacitively coupled RF discharge

被引：7
|
作者：
Dubinov, AE [1 ]
Sadovoy, SA
Selemir, VD
机构：
[1] Moscow Engineer Phys Inst, Branch 4, Sarov 16, Arzamas, Russia
[2] All Russia Sci Res Inst Expt Phys, Russian Fed Nucl Ctr, Sarov 16, Arzamas, Russia
来源：
SHOCK WAVES | 2000年 / 10卷 / 01期
关键词：
shock wave; capacitively coupled RF discharge; charged particle concentration;
D O I：
10.1007/s001930050180
中图分类号：
O3 [力学];
学科分类号：
08 ; 0801 ;
摘要：
The velocity of shock wave propagation in the air plasma of stationary capacitively coupled RF discharge at different gas pressure and charged particles concentration has been measured. It is shown, that the velocity of the shock wave increases at the increase of the concentration. Measurement results are brought to the universal dependence.
引用
收藏
页码：73 / 76
页数：4
相关论文
共 50 条
  • [31] The Discharge Characteristics of Capacitively Coupled Ar Plasma as the Change of Pressure
    Yin, G. Q.
    Wang, J. J.
    Yuan, Q. H.
    PLASMA PHYSICS REPORTS, 2023, 49 (06) : 802 - 807
  • [32] PLASMA POLYMERIZATION OF TETRAFLUOROETHYLENE IN A CAPACITIVELY COUPLED DISCHARGE WITH INTERNAL ELECTRODES
    MOROSOFF, N
    YASUDA, H
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1978, 176 (SEP): : 112 - 112
  • [33] Power dynamics in a low pressure capacitively coupled plasma discharge
    Rauf, Shahid
    Bera, Kallol
    Collins, Ken
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2010, 19 (01):
  • [34] Dust charge measurement in a strongly coupled dusty plasma produced by an rf discharge
    Sharma, S. K.
    Kalita, Ranjan
    Nakamura, Y.
    Bailung, H.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2012, 21 (04):
  • [35] The Effect of Inductively Coupled Discharge on Capacitively Coupled Nitrogen-Hydrogen Plasma
    Zhang Zhihui
    Wu Xuemei
    Ning Zhaoyuan
    PLASMA SCIENCE & TECHNOLOGY, 2014, 16 (04) : 352 - 355
  • [36] The Effect of Inductively Coupled Discharge on Capacitively Coupled Nitrogen-Hydrogen Plasma
    张志辉
    吴雪梅
    宁兆元
    Plasma Science and Technology, 2014, 16 (04) : 352 - 355
  • [37] PROPAGATION OF WEAK SHOCK-WAVES IN PLASMA OF LONGITUDINAL FLOW DISCHARGE IN AIR
    VOINOVICH, PA
    ERSHOV, AP
    PONOMAREVA, SE
    SHIBKOV, VM
    HIGH TEMPERATURE, 1991, 29 (03) : 468 - 476
  • [38] The Effect of Inductively Coupled Discharge on Capacitively Coupled Nitrogen-Hydrogen Plasma
    张志辉
    吴雪梅
    宁兆元
    Plasma Science and Technology, 2014, (04) : 352 - 355
  • [39] Effect of discharge voltage on capacitively coupled, parallel plate rf hydrogen plasmas
    Diomede, P
    Capitelli, M
    Longo, S
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2005, 14 (03): : 459 - 466
  • [40] Effects of a small transverse magnetic field upon a capacitively coupled RF discharge
    Dublin City Univ, Dublin, Ireland
    IEEE Trans Plasma Sci, 4 (636-643):
12345