Some current research in femtosecond laser-induced surface ripple structures

被引:4
|
作者
Zheng, H. Y. [1 ]
Wang, X. C. [1 ]
Zhou, W. [2 ]
机构
[1] Singapore Inst Mfg Technol, Singapore 638075, Singapore
[2] Nanyang Technol Univ, Precis Engn & Nanotechnol Ctr, Sch Mech & Aerosp Engn, Singapore 639798, Singapore
关键词
femtosecond laser; surface morphology; ripples; InP; GaN/sapphire; laser fluence; PULSE LASER; INDIUM-PHOSPHIDE; ABLATION; SAPPHIRE; INP; MORPHOLOGY;
D O I
10.1504/IJSURFSE.2009.024365
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
Some current research in femtosecond (fs) laser induced surface nano/micro structures on compound semiconductors is discussed in this paper. Both wavelength and sub-wavelength periodic surface structures were observed on InP and GaN/sapphire surfaces irradiated with fs laser pulses. It was found that the morphology of the periodic structure was dependent on the polarisation of the laser beam and the number of laser pulses, and the period was dependent on the incident laser fluence. Through finely adjusting laser fluence and pulse number, uniform ripples can be achieved. The mechanisms involved in the formation laser induced surface structures are also discussed.
引用
收藏
页码:114 / 124
页数:11
相关论文
共 50 条
  • [21] Effect of irradiation wavelength on femtosecond laser-induced homogenous surface structures
    Biswas, Sanchari
    Ghosh, Abhi
    Odusanya, Adeola
    Kietzig, Anne-Marie
    APPLIED SURFACE SCIENCE, 2019, 493 : 375 - 383
  • [22] Formation of organic layer on femtosecond laser-induced periodic surface structures
    Yasumaru, Naoki
    Sentoku, Eisuke
    Kiuchi, Junsuke
    APPLIED SURFACE SCIENCE, 2017, 405 : 267 - 272
  • [23] Femtosecond laser-induced periodic surface structures on hard and brittle materials
    Zhao, GuoXu
    Wang, Gong
    Li, YunFei
    Wang, Lei
    Lian, YuDong
    Yu, Yu
    Zhao, Hui
    Wang, YuLei
    Lu, ZhiWei
    SCIENCE CHINA-TECHNOLOGICAL SCIENCES, 2024, 67 (01) : 19 - 36
  • [24] Antireflection effect of femtosecond laser-induced periodic surface structures on silicon
    Vorobyev, A. Y.
    Guo, Chunlei
    OPTICS EXPRESS, 2011, 19 (19): : A1031 - A1036
  • [25] Femtosecond laser-induced periodic surface structures on hard and brittle materials
    GuoXu Zhao
    Gong Wang
    YunFei Li
    Lei Wang
    YuDong Lian
    Yu Yu
    Hui Zhao
    YuLei Wang
    ZhiWei Lu
    Science China Technological Sciences, 2024, 67 : 19 - 36
  • [26] Optical Properties of Femtosecond Laser-Induced Periodic Surface Structures on Metals
    Vorobyev, Anatoliy Y.
    Makin, Vladimir S.
    Guo, Chunlei
    2009 52ND IEEE INTERNATIONAL MIDWEST SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOLS 1 AND 2, 2009, : 909 - +
  • [27] Evolution of femtosecond laser-induced periodic surface structures: from nanoholes to regular structures
    Li, Zhen-Ze
    Wang, Lei
    Fan, Hua
    Yu, Yan-Hao
    Chen, Qi-Dai
    Juodkazis, Saulius
    Sun, Hong-Bo
    SPIE MICRO + NANO MATERIALS, DEVICES, AND APPLICATIONS 2019, 2019, 11201
  • [28] Laser-induced periodic surface structures formed on the sidewalls of microholes trepanned by a femtosecond laser
    Khai Xuan Pham
    Rie Tanabe
    Yoshiro Ito
    Applied Physics A, 2013, 112 : 485 - 493
  • [29] Laser-induced periodic surface structures formed on the sidewalls of microholes trepanned by a femtosecond laser
    Khai Xuan Pham
    Tanabe, Rie
    Ito, Yoshiro
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2013, 112 (02): : 485 - 493
  • [30] Sharp transition of laser-induced periodic ripple structures
    Yang, Haifeng
    He, Haidong
    Zhou, Longpeng
    Qian, Jiguo
    Hao, Jingbin
    Zhu, Hua
    OPTICA APPLICATA, 2012, 42 (04) : 795 - 803