Laser-induced periodic surface structures formed on the sidewalls of microholes trepanned by a femtosecond laser

被引:0
|
作者
Khai Xuan Pham
Rie Tanabe
Yoshiro Ito
机构
[1] Nagaoka University of Technology,Department of Mechanical Engineering
来源
Applied Physics A | 2013年 / 112卷
关键词
Incident Beam; Orientation Angle; Femtosecond Laser Pulse; Relative Angle; Electric Vector;
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摘要
Laser-induced periodic surface structures (LIPSSs) were observed on the sidewalls of 300-μm-diameter holes trepanned on cemented tungsten carbide using femtosecond laser pulses at a wavelength of 800 nm. For a circularly polarized beam, LIPSSs were formed at a period of 300 nm and oriented perpendicularly to the plane of incidence on the sidewalls. For a linearly polarized beam, LIPSS formation was dependent on the relative angle α between the polarization direction and the plane of incidence. For relative angles α from 0° to 70° and from 110° to 180°, LIPSS spacing was 300 nm. However, there were two types of LIPSSs coexisting from 70° to 110°. One had a spacing of 120 nm and the other had a spacing that varied from 500 to 760 nm. It was found that the orientation angle of LIPSSs measured between the LIPSS orientation and the plane of incidence had a nonlinear dependence on α. To understand this dependence, a model was proposed in which LIPSSs are assumed to align perpendicularly to the direction of the absorbed electric field lying in the tangent plane of the sidewall of a drilled hole. The calculated results from this model showed good agreement with the experimental results.
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页码:485 / 493
页数:8
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