Direct E-Beam writing of electro-optic polymer channel waveguides

被引：0

作者：

Belardini, A ^{[1
]}

Larciprete, MC ^{[1
]}

Cianci, E ^{[1
]}

Foglietti, V ^{[1
]}

Ratsimihety, A ^{[1
]}

Rousseau, A ^{[1
]}

Michelotti, F ^{[1
]}

机构：

[1] Univ Roma La Sapienza, Dipartimento Energet, I-00161 Rome, Italy

来源：

MICRORESONATORS AS BUILDING BLOCKS FOR VLSI PHOTONICS | 2004年 / 709卷

关键词：

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The possibility to use electron-beam writing on an electro-optic cross-linkable polymer film deposited on a Si/SiO2 substrate is investigated. Both positive and negative electron-beam writings have been performed, with different exposure doses. Good resolution and a depth of 30 nm was obtained in the positive case, while in the negative case a lower resolution was obtained and a depth of 580 run. With negative writing we fabricated test channel waveguides of good optical quality.

引用

页码：427 / 428

页数：2

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