A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction

被引：3
|
作者：
Wang, Weimin [1 ,2 ,3 ]
Hu, Fangrong [4 ]
Wang, Qiang [1 ]
Qiu, Chuankai [1 ]
Chen, Zexiang [2 ]
Yao, Jun [1 ]
机构：
[1] Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China
[2] Univ Elect Sci & Technol China, Sch Optoelect Informat, Chengdu 610054, Peoples R China
[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
[4] Guilin Univ Elect Technol, Coll Elect Engn & Automatizat, Guilin 541004, Peoples R China
来源：
AIP ADVANCES | 2014年 / 4卷 / 03期
基金：
中国国家自然科学基金; 美国国家科学基金会;
关键词：
ADAPTIVE OPTICS;
D O I：
10.1063/1.4867336
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A 45-element continuous facesheet surface micromachined deformable mirror (DM) is presented and is fabricated using the PolyMUMPs multi-user micro-electromechanical system processes. The effects of the structural parameters on the characteristics of the DM, such as its stroke, frequency and actuator coupling, are analyzed. In addition, the DM design has also been verified through experimental testing. This DM prototype has a surface figure of 0.5 mu m and a fill factor of 95%. The DM can provide a 0.6 mu m stroke with 5.9% actuator coupling. A static aberration correction based on this DM is also demonstrated, which acts as a reference for the potential adaptive optics (AO) applications of the device. (C) 2014 Author(s).
引用
收藏
页数：10
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